Edge coupling device fabrication
US9703039B2 · kind B2 · utility
3Cited by
1References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2015 |
| Grant date | Jul 11, 2017 |
| Priority date | — |
| Expiry date | Apr 17, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12195
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating an edge coupling device and an edge coupling device are provided. The method includes removing a portion of cladding material to form a trench over an inversely tapered silicon waveguide, depositing a material having a refractive index greater than silicon dioxide over remaining portions of the cladding material and in the trench, and removing a portion of the material within the trench to form a ridge waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.