Agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle
US9703188B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Nov 3, 2015 |
| Grant date | Jul 11, 2017 |
| Priority date | — |
| Expiry date | Mar 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.