Integrated bio-sensor with nanocavity and fabrication method thereof
US9704898B2 · kind B2 · utility
9Cited by
2References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2016 |
| Grant date | Jul 11, 2017 |
| Priority date | — |
| Expiry date | Jan 6, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6482
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bio-sensor includes a substrate having a light-sensing region thereon. A first dielectric layer, a diffusion barrier layer, and a second dielectric layer are disposed on the substrate. A trenched recess structure is formed in the second dielectric layer, which is filled with a light filter layer that is capped with a cap layer. A first passivation layer and a nanocavity construction layer are disposed on the cap layer. A nanocavity is formed in the nanocavity construction layer. The sidewall and bottom surface of the nanocavity is lined with a second passivation layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.