Plasma generator using dielectric resonator
US9706635B2 · kind B2 · utility
4Cited by
11References
12Claims
0Family size
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Key dates
| Filing date | Oct 6, 2016 |
| Grant date | Jul 11, 2017 |
| Priority date | — |
| Expiry date | Oct 6, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E30/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dielectric resonator is excited at its natural resonant frequency to produce a highly uniform electric field for the generation of plasma. The plasma may be used in a optical or mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.