Thermal flow sensor, gas sensor comprising at least one such sensor and Pirani gauge comprising at least one such sensor
US9709536B2 · kind B2 · utility
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5References
18Claims
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Key dates
| Filing date | Sep 17, 2013 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | Dec 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2011/0093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.