Acceleration sensor and method for producing an acceleration sensor

US9709596B2 · kind B2 · utility

Assignee

• NORTHROP GRUMMAN LITEF GMBH · DE

Inventors

• Wolfram Geiger · Gomaringen, DE
• Julian Bartholomeyczik · Reutlingen, DE
• Peter Leinfelder · Ehrenkirchen, DE

Key dates

• Filing date: Mar 27, 2014
• Grant date: Jul 18, 2017
• Expiry date: Jun 2, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0882
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass.