Inverse taper waveguides for low-loss mode converters

US9709741B2 · kind B2 · utility

Assignee

• Futurewei Technologies, Inc. · US

Inventors

• Li Yang · San Jose, US
• Huapu Pan · San Jose, US
• Qianfan Xu · Houston, US
• Dawei Zheng · Irvine, US
• Xiao Shen

Key dates

• Filing date: Apr 30, 2015
• Grant date: Jul 18, 2017
• Expiry date: Jul 5, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/305
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An apparatus comprises a substrate comprising a silicon dioxide (SiO2) material disposed on top of the substrate, a silicon waveguide comprising a first adiabatic tapering and enclosed in the silicon dioxide material, and a low-index waveguide disposed on top of the substrate and adjacent to the first adiabatic tapering. A mode converter fabrication method comprises obtaining a mode converter comprising a substrate, a silicon waveguide disposed on the substrate and comprising a sidewall and a first adiabatic tapering, and a hard mask disposed on the silicon waveguide and comprising a silicon dioxide (SiO2) layer, wherein the hard mask does not cover the sidewall, and oxidizing the silicon waveguide and the hard mask, wherein oxidizing the silicon waveguide and the hard mask encloses the silicon waveguide within the silicon dioxide layer.