Method for providing a magnetic recording write apparatus by predefining side shields
US9711168B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2016 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | May 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/315
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.