Curved RF electrode for improved Cmax
US9711290B2 · kind B2 · utility
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1References
12Claims
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Assignee
Inventors
Key dates
| Filing date | Sep 24, 2014 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | Sep 24, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0109
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.