UV light source having combined ionization and formation of excimers

US9718705B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• SICO Technology GmbH · AT

Inventors

• Bentsian Elkin · Echterdingen, DE
• Alexander Lohner · Stuttgart, DE
• Siegfried Egner · Adelsheim, DE

Key dates

• Filing date: Oct 18, 2013
• Grant date: Aug 1, 2017
• Expiry date: Dec 18, 2033

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C02F2303/04
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.