Micro-gyroscope and method for operating a micro-gyroscope
US9719784B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 17, 2015 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Aug 28, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.