Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
US9719877B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 28, 2015 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Jan 1, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.