Multi-axis inertial sensor with dual mass and integrated damping structure
US9720012B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2015 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Dec 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0882
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inertial sensor includes first and second movable elements suspended from a substrate and interconnected by a beam. The second movable element is positioned laterally adjacent to the first movable element, and each of the movable elements has a mass that is asymmetric relative to a rotational axis. A first spring system couples the first movable element to the substrate and a second spring system couples the second movable element to the substrate. The spring systems and the beam enable the movable elements to move together in response to force imposed upon the movable elements. In particular, the first and second movable elements can undergo in-plane torsion motion in response to force, such as acceleration, imposed in a sense direction. Additionally, damping structures may be integrated into the first and second movable elements to effectively increase a damping ratio of the device resulting from the in-plane torsion motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.