Patent · US Active

Device and method for acquiring a microscopic image of a sample structure

US9720221B2 · kind B2 · utility

2Cited by

0References

6Claims

0Family size

Assignee

LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

Marcus Dyba · Wetzlar, DE
Jonas Foelling · Freiburg (Elbe), DE

Key dates

Filing date	Jul 22, 2011
Grant date	Aug 1, 2017
Priority date	—
Expiry date	Jul 17, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH04N5/253
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device and a method for acquiring a microscopic image of a sample structure are described. An optic for imaging the sample structure and a reference structure is provided, as well as a drift sensing unit for sensing a drift of the sample structure relative to the optic on the basis of the imaged reference structure. The optic comprises a first sharpness plane for imaging the sample structure and at the same time a second sharpness plane, modifiable in location relative to the first sharpness plane, for imaging the reference structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.