Amino sulfonic acid based polymers for copper electroplating
US9725816B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Dec 30, 2014 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Dec 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/0723
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Amino sulfonic acid based polymers are reaction products of amino sulfonic acids, an amine, polyepoxide compounds and epihalohydrin. The polymers may be used as levelers in copper electroplating baths, to provide good throwing power. Such reaction products may plate copper or copper alloys with good surface properties and good physical reliability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.