Shock-robust integrated multi-axis MEMS gyroscope
US9726493B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Sep 4, 2014 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Jun 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various embodiments of the invention integrate multiple shock-robust single-axis MEMS gyroscopes into a single silicon substrate while avoiding the complexities typically associated with designing a multi-drive control system for shock immune gyroscopes. In certain embodiments of the invention, a shock immune tri-axial MEMS gyroscope is based on a driving scheme that employs rotary joints to distribute driving forces generated by two sets of driving masses to individual sensors, thereby, simplifying the control of the gyroscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.