Apparatus and methods for finding a best aperture and mode to enhance defect detection
US9726617B2 · kind B2 · utility
13Cited by
3References
23Claims
0Family size
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Key dates
| Filing date | Nov 8, 2013 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Jan 7, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.