Resonant surface acoustic wave chemical detector
US9726646B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2014 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Aug 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/102
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for chemical detection includes a pair of interdigitated transducers (IDTs) formed on a piezoelectric substrate. The apparatus includes a layer of adsorptive material deposited on a surface of the piezoelectric substrate between the IDTs, where each IDT is conformed, and is dimensioned in relation to an operating frequency and an acoustic velocity of the piezoelectric substrate, so as to function as a single-phase uni-directional transducer (SPUDT) at the operating frequency. Additionally, the apparatus includes the pair of IDTs is spaced apart along a propagation axis and mutually aligned relative to said propagation axis so as to define an acoustic cavity that is resonant to surface acoustic waves (SAWs) at the operating frequency, where a distance between each IDT of the pair of IDTs ranges from 100 wavelength of the operating frequency to 400 wavelength of the operating frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.