Patent · US Active

High index contrast grating structure for light manipulation and related method

US9726794B2 · kind B2 · utility

2Cited by
0References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 15, 2015
Grant dateAug 8, 2017
Priority date—
Expiry dateAug 7, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B5/1809
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A high index contrast grating (HICG) structure is disclosed. The HICG structure includes plurality of gratings fabricated from a high refractive index layer. The high refractive index layer is situated over a low refractive index substrate, wherein the high refractive index layer is patterned after determining a period and a duty cycle of each of the plurality of gratings for a desired reflection phase profile based on a lookup table. The low refractive index substrate includes sapphire. The plurality of gratings includes polycrystalline or amorphous silicon. The HICG structure includes subwavelength gratings for incident wavelengths of equal to or greater than 2.5 microns. An exemplary method for forming the HICG structure is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.