Attitude changing apparatus, aligning apparatus, attitude changing method and aligning method
US9728433B2 · kind B2 · utility
2Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2016 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Sep 21, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An attitude changing apparatus which can change an attitude of a component with certainty without damaging the component. The component has a rectangular parallelepiped shape where a pair of rectangular end surfaces opposite to each other are connected to each other by four side surfaces. The component is stored in a cavity which penetrates between main surfaces of a conveyance member, the conveyance member is moved relative to a base, and the component is made to pass through an engaging groove formed on a reference surface of the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.