Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic wave measurement apparatus
US9728709B2 · kind B2 · utility
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2References
19Claims
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Key dates
| Filing date | Mar 18, 2015 |
| Grant date | Aug 8, 2017 |
| Priority date | — |
| Expiry date | Mar 18, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/079
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric element in which a first electrode, a piezoelectric body layer comprised of a composite oxide having a perovskite structure that includes at least Pb, Nb and Ti, and a second electrode are sequentially laminated on a substrate, in which a crystal that configures the piezoelectric body layer has a tetragonal structure, and the crystal is {100} oriented to the substrate, and in which a region having a (100) plane and a region having a (001) plane that are perpendicular with respect to a direction of lamination, are mixed inside a lattice of the crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.