Sensor array with self-aligned optical cavities
US9733128B2 · kind B2 · utility
0Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2015 |
| Grant date | Aug 15, 2017 |
| Priority date | — |
| Expiry date | May 31, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/413
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensing device includes an array of sensing elements. Each sensing element includes a thermal infrared sensor, configured to output an electric signal in response to an intensity of infrared radiation that is incident on the sensor. An individual reflector is formed integrally with the sensor at a location separated from the sensor by one quarter wave at a selected wavelength of the infrared radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.