Gas concentration sensor with a suspended structure
US9733223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2015 |
| Grant date | Aug 15, 2017 |
| Priority date | — |
| Expiry date | Aug 9, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A concentration sensor for at least one given gas comprising at least one suspended structure (2) with respect to a support, said suspended structure (2) being of an electrically conductive material and said structure having a low heat response time, means for biasing said suspended element (2) and means (8) for measuring the variation of the electric voltage at the terminals of the suspended structure (2), the biasing means (6) being formed by an alternating current source the intensity of which heats the suspended structure (2) and the frequency of which gives rise to a phase shift between a signal of the biasing means and a signal measured by the measuring means, and means for determining a phase shift variation due to a gas concentration variation and means for determining the concentration variation of said gas from the phase variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.