Bulk acoustic wave resonator having a plurality of compensation layers and duplexer using same
US9735754B2 · kind B2 · utility
13Cited by
9References
30Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 26, 2012 |
| Grant date | Aug 15, 2017 |
| Priority date | — |
| Expiry date | Oct 3, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/706
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator (BAWR) includes a bulk acoustic resonance unit and at least one compensation layer. The bulk acoustic resonance unit includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode. The first electrode, the second electrode, and the piezoelectric layer each include a material that modifies a resonance frequency based on a temperature, and the at least one compensation layer includes a material that adjusts the resonance frequency modified based on the temperature in a direction opposite to a direction of the modification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.