Process for producing polycrystalline silicon

US9738531B2 · kind B2 · utility

Assignee

• Wacker Chemie AG · DE

Inventors

• Barbara Mueller · Langenau, DE
• Walter Haeckl · Zeilarn, DE
• Wolfgang Stoiber · Eggenfelden, DE

Key dates

• Filing date: Aug 27, 2014
• Grant date: Aug 22, 2017
• Expiry date: Aug 27, 2034

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01B33/035
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Installation of a shield around a Siemens reactor prior to harvesting polysilicon rods produced therein allows the upper, bell jar-like shell to be removed for cleaning, while protecting the polysilicon rods from contamination and increasing safety of nearby personnel. The polysilicon rods are harvested while the shield is present.