System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter
US9739655B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2013 |
| Grant date | Aug 22, 2017 |
| Priority date | — |
| Expiry date | Sep 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.