Multi-electrode conductive probe, manufacturing method of insulating trenches and measurement method using multi-electrode conductive probe
US9739802B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2014 |
| Grant date | Aug 22, 2017 |
| Priority date | — |
| Expiry date | Aug 4, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06744
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-electrode conductive probe, a manufacturing method of insulating trenches and a measurement method using the multi-electrode conductive probe are disclosed. The conductive probe includes a base, a plurality of support elements, a plurality of tips and a conductive layer. The base has a surface and a plurality of protrusions. The protrusions are configured on the surface in a spacing manner, and an insulating trench is disposed between the two adjacent protrusions. The support elements are disposed at the base and protrude from the base. The tips are disposed on the end of the support elements away from the base. The conductive layer covers the surface of the base, the protrusions, the support elements and the tips. Portions of the conductive layer on the two adjacent support elements are electrically insulated from each other by at least an insulating trench.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.