F-theta lens and laser processing device for far-infrared laser processing
US9739984B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 31, 2012 |
| Grant date | Aug 22, 2017 |
| Priority date | — |
| Expiry date | Feb 23, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/382
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An Fθ lens and a laser processing device for far-infrared laser processing are provided. The Fθ lens for far-infrared laser processing comprises a first lens (L1), a second lens (L2) and a third lens (L3) which are coaxially arranged successively along a transmission direction of incident light beams, wherein the first lens is a negative meniscus lens, and the second lens and the third lens are positive meniscus lenses; and all the middle parts of the first lens, the second lens and the third lens protrude towards the transmission direction of incident light beams. The Fθ lens can improve the imaging quality and the resolution distance, effectively calibrate the astigmatism and distortion of the lens, reduce the influence of high-order aberrations, and has a high degree of energy concentration of laser focus points and high processing accuracy, thereby meeting the requirements for cutting or drilling. The Fθ lens is miniaturized, so that the volume of the lens is effectively controlled, and costs are reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.