Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
US9739998B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2013 |
| Grant date | Aug 22, 2017 |
| Priority date | — |
| Expiry date | Nov 5, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4902
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.