Method of two-step parylene patterning and etching to release a parylene sandwiched device
US9743885B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2014 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | Jun 27, 2035 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/12
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An example method involves: forming a first bio-compatible layer that defines a first side of a bio-compatible device; forming a conductive pattern over a portion of the first bio-compatible layer; mounting an electronic component to the electrical contacts; forming a second bio-compatible layer over the first bio-compatible layer, the electronic component, the conductive pattern, wherein the second bio-compatible layer defines a second side of the bio-compatible device; forming a first etch mask to partially cover the second bio-compatible layer, thereby exposing a first portion of the second bio-compatible layer; removing the first portion of the second bio-compatible layer; forming a second etch mask to partially cover the second bio-compatible layer, thereby exposing a second portion of the second bio-compatible layer; and removing the second portion of the second bio-compatible layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.