Apparatus and method for accurate measurement and mapping of forward and reverse-bias current-voltage characteristics of large area lateral p-n junctions
US9746514B2 · kind B2 · utility
2Cited by
11References
27Claims
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Key dates
| Filing date | Sep 2, 2014 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | Mar 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2632
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.