MEMS switch
US9748048B2 · kind B2 · utility
10Cited by
17References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2014 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | Apr 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.