Thermal flow meter with an asymmetrical inflow-side of circuit package
US9752908B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2013 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Jan 7, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flow meter has improved measurement accuracy due to the shape of a circuit package. The circuit package has a measurement surface and a backside of a measurement surface of a rear surface thereof is located in a bypass passage, the bypass passage being configured to allow a measurement target gas to flow therein dividing the measurement target gas into a flow path at a side of the measurement surface and a flow path at a side of the backside of measurement surface of a rear surface thereof. An inflow-side end surface of the circuit package has different shapes at the side of the measurement surface and at the side of the backside of the measurement surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.