Determination of spatial distribution of charged particle beams
US9754360B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2015 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Dec 22, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A point spread function (PSF) of a focused scanning particle beam of an observation instrument is ascertained by obtaining a first image (reference image) based on a reference instrument, the reference image being an image of an area of a reference standard, obtaining a second image (observed image) of the area of the reference standard, and the observed image obtained using the observation instrument configured with a set of operational parameters that define a probe size for the observation instrument, the probe size being larger than a pixel size of the reference image, and then determining, based on the reference image and the observed image, the PSF of the observation instrument as a component of a convolution of the reference image that provides the observed image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.