Method for creating a resonator
US9755612B2 · kind B2 · utility
1Cited by
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21Claims
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Key dates
| Filing date | Dec 20, 2012 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Jan 21, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/5436
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.