Patent · US Active

Method for creating a resonator

US9755612B2 · kind B2 · utility

1Cited by
0References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 2012
Grant dateSep 5, 2017
Priority date
Expiry dateJan 21, 2034

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC04B2235/5436
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.