Vibration robust x-axis ring gyro transducer
US9759563B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2012 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Jan 19, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/574
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.