MEMS vibrating-beam accelerometer with piezoelectric drive
US9759739B2 · kind B2 · utility
1Cited by
17References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2011 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Nov 11, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.