Method and arrangement for forming a structuring on surfaces of components by means of a laser beam

US9764424B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Teja Roch · Dresden, DE
• Dimitri Benke · Dresden, DE
• Andres Fabian Lasagni · Dresden, DE

Key dates

• Filing date: Mar 13, 2014
• Grant date: Sep 19, 2017
• Expiry date: Sep 15, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70408
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a method for forming a structuring at surfaces of components using a laser beam. In the invention, a laser beam is directed onto a diffractive optical element. The diffractive optical element is configured such that the laser beam is split into at least two part beams and the part beams are directed at an angle α with respect to the optical axis of the laser beam onto at least one further optical element which is transparent for the laser radiation. The further optical element(s) has/have a first surface and a second surface which is inclined at an angle to the optical axis of the laser beam at which the beam direction of the part beams is changed by optical refraction. A focusing optical lens is arranged in the optical path of the part beams between the further optical element(s) and a component surface to be processed, and the part beams are focused such that they are incident onto the surface of the component at a common position at an angle of incidence β with respect to the optical axis of the laser beam. The distance d1 between the optical elements is changed to change the interference period.