MEMs device with outgassing shield
US9764946B2 · kind B2 · utility
4Cited by
19References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2013 |
| Grant date | Sep 19, 2017 |
| Priority date | — |
| Expiry date | Oct 24, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/019
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A capped micromachined device has a movable micromachined structure in a first hermetic chamber and one or more interconnections in a second hermetic chamber that is hermetically isolated from the first hermetic chamber, and a barrier layer on its cap where the cap faces the first hermetic chamber, such that the first hermetic chamber is isolated from outgassing from the cap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.