Interferometric measurement device comprising a filtering interferometer
US9766070B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2013 |
| Grant date | Sep 19, 2017 |
| Priority date | — |
| Expiry date | Dec 12, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/64
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric measurement device includes a broad-spectrum spontaneous emission light source; a measurement interferometer, receiving a light signal with input light power and delivering a modulated light signal with output light power, the modulated light signal being modulated at a modulation frequency, depending on a physical parameter to be measured and being proportional to the input light power; an optical radiation detector, receiving the modulated light signal exiting from the measurement interferometer and delivering a modulated electrical signal representative of the output light power; a filtering interferometer, insensitive to the physical parameter to be measured, having a free spectral range ISL and a finesse F selected such that an interval of frequencies, centerd around an optimal frequency foptim equal to (2k+1)ISL/2, k being a natural number, and of width Δf equal to [0.9−(3/2F)]ISL, includes the modulation frequency of the modulated light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.