Patent · US Active

Chemical characterization of surface features

US9766179B2 · kind B2 · utility

0Cited by

90References

20Claims

0Family size

Assignee

Seagate Technology LLC · US

Inventors

Joachim Walter Ahner · Livermore, US
Samuel Kah Hean Wong · Johor Bahru, MY
Maissarath Nassirou · Fremont, US
Henry Luis Lott · Fremont, US
David M. Tung · Livermore, US
Florin Zavaliche · San Ramon, US
Stephen Keith McLaurin · Sunnyvale, US

Key dates

Filing date	Feb 25, 2016
Grant date	Sep 19, 2017
Priority date	—
Expiry date	Feb 25, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/0683
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.