Substrate storing container
US9768045B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 20, 2012 |
| Grant date | Sep 19, 2017 |
| Priority date | — |
| Expiry date | Nov 20, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D2585/86
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.