Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners
US9770771B2 · kind B2 · utility
6Cited by
7References
13Claims
0Family size
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Key dates
| Filing date | Dec 21, 2012 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Apr 6, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4979
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.