Patent · US Active

Method for modifying a TCO coating

US9771650B2 · kind B2 · utility

1Cited by

0References

4Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Vincent Fischer · St. Petersburg, US
Benjamin Graffel · Zwickau, DE
Falk Winckler · Rippien, DE
Björn Meyer · Dresden, DE
Matthias Fahland · Dresden, DE
Steffen Günther · Dresden, DE

Key dates

Filing date	Aug 25, 2016
Grant date	Sep 26, 2017
Priority date	—
Expiry date	Aug 25, 2036

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/5873
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen, or oxygen, or a gas mixture of at least two of the above-mentioned gasses has been introduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.