MEMS capacitive pressure sensor
US9772245B2 · kind B2 · utility
63Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2013 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Nov 22, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49117
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.