Magnet plate assembly, deposition apparatus including the same, and deposition method using the same
US9773600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2015 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Nov 13, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.