Patent · US Active

Display device having transparent conductive film and metal film

US9773818B2 · kind B2 · utility

330Cited by
57References
18Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 7, 2014
Grant dateSep 26, 2017
Priority date
Expiry dateNov 7, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K2102/103
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.