Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film
US9773968B2 · kind B2 · utility
1Cited by
2References
20Claims
0Family size
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Key dates
| Filing date | Dec 18, 2014 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Jul 27, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/787
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below.C/(A+C)≧0.1 formula 1
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.