Mullite sintered body, method for producing the same, and composite substrate
US9776924B2 · kind B2 · utility
2Cited by
1References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 9, 2016 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Mar 9, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/72
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A mullite sintered body according to the present invention has an impurity element content of 1% by mass or less and contains sintered mullite grains having an average grain size of 8 μm or less. When a surface of the mullite sintered body is finished by polishing, pores in the surface have an average largest pore length of 0.4 μm or less. The surface preferably has a center line average surface roughness (Ra) of 3 nm or less. The surface preferably has a maximum peak height (Rp) of 30 nm or less. The number of pores in the surface is preferably 10 or less per unit area of 4 μm×4 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.