Mass spectrometer
US9779924B2 · kind B2 · utility
1Cited by
12References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2014 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Sep 17, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus for a mass spectrometer is disclosed comprising an ion source, a heater for heating a gas flow to the ion source, a temperature sensor for monitoring the temperature of the heater, and a control system. The control system is arranged and adapted to determine a flow rate of the gas flow by monitoring the power supplied to the heater and the temperature of the heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.